Description
Specific Model: MD8271054
Wafer size: 6 inch
Wafer type: Jeida flat
Wafer flow:
Number coater/developer modules: 2C/3D
InLine system: Yes
Resists / Coaters: 4 (mini)
E2 Develop nozzle kits: H-nozzle (3)
RRC Pumps & kits:
Dual‐stream nozzles / Developer: NA
Solvent & developer auto supply systems: Yes
Temperature / Humidity controller: Yes
Configuration/layout of each block: See below
GEM: yes
AVG:
HMDS Bubblers: venturi
Power supply: 208 V, 3 Phase, AC Transformer:
Vintage: 1997
Missing parts: none
Defected parts: 1 airco temp unit
