Description
| Manufacturer: | SUSS |
| Model: | ACS200
200AA129 |
| Wafer size: | 200 mm |
| Photoresist/coater: | 2 (inches) Kit: Cybor pump and kit controller |
| InLine system: | None |
| Automatic supply system for solvent and developer: | None |
| Description: | •Coater x 2
•Hot-plate x 2 •Cool-plate x 1 •Gencobot 8/3L wafer handling robot •Gen-mark robot |
| Power supply: | 208 V, 3 phase, AC transformer |
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