描述
光刻機/曝光機用化學濾網，防止Lens霧化
| Model No. 濾網型號 | ChemSorb Pleat | OEM P/N NO.: FAM-7GC |
| Chemical Filter Dimension濾網尺寸 | WxHxD: mm | 430x552x183 |
| Air Flow處理風量 | CMH | 427 (0.5 m/s) |
| Initial Pressure Drop初始壓損 | Pa | <= 60 |
| Filter Media Area濾材面積 | m2 | 7.5 |
| Media Type濾材種類 | Type | ChemSorb Type ABC |
| Target Gases過濾氣體 | — | Acid: H2S, SO2, HNO3, HCl, HBr, HF, Cl2;
Base: NH3, NMP, Amine; Condensables*: Toluene, PGME, PGMEA, HMDS, HMDSO, Total Molecular Siloxanes (TMS) |
| Initial Efficiency初始效率** | — | > 95% |
| Frame框材 | Type | Aluminum |
| Separator Finger分隔片 | Type | Enhanced PP |
| Edge Binding氣密膠 | Type | PU or Hot Melt |
| Particle Emission潔淨度 | Type | ISO Class 6 |
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